Glancing Angle Deposition and Growth Mechanism of Inclined AlN Nanostructures Using Reactive Magnetron Sputtering
نویسندگان
چکیده
منابع مشابه
Designing Nanostructures by Glancing Angle Deposition
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ژورنال
عنوان ژورنال: Coatings
سال: 2020
ISSN: 2079-6412
DOI: 10.3390/coatings10080768